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You are here:   » Products » Optical Technologies » Equipment » Thin Film Equipment » Systems for Manufacturing of OLED Displays & Lighting » In-Line Deposition System - Mass Production

Systems for Manufacturing of OLED Displays & Lighting

In-Line Deposition System - Mass Production

Key Features

  • Substrate size up to 1100 x 1300mm (Gen.5)
  • Organic process chambers for up to 12 layers
  • Metal sputtering
  • Automated mask handling
  • Linear transfer system
  • All optional extensions for Turnkey lines

Description

Vacuum deposition system for area color & full color organic light emitting devices (displays and lighting). It is configured as an in-line tool with loadlocks, linear transfer, pre-treatment, organic and metal process chambers, buffer and transfer chambers as needed, incl. automated mask handling (stockers, transfer, alignment). It utilizes a patented line evaporation source from the manufacturer SNU Precision.
The system is capable of forming any layer needed to build-up an OLED device with a film uniformity of < 3% and an alignment accuracy of < 20µm at a tact time < 2 min (1000 Å film).

The system can be completed as a turnkey manufacturing line with TCO coating, glass
processing, quality and defect inspection tools with all necessary applications, as well
as a complete glass encapsulation line.

Applications

Lighting, Displays