Systems for Manufacturing of OLED Displays & Lighting
In-Line Deposition System - Mass Production
- Substrate size up to 1100 x 1300mm (Gen.5)
- Organic process chambers for up to 12 layers
- Metal sputtering
- Automated mask handling
- Linear transfer system
- All optional extensions for Turnkey lines
DescriptionVacuum deposition system for area color & full color organic light emitting devices (displays and lighting). It is configured as an in-line tool with loadlocks, linear transfer, pre-treatment, organic and metal process chambers, buffer and transfer chambers as needed, incl. automated mask handling (stockers, transfer, alignment). It utilizes a patented line evaporation source from the manufacturer SNU Precision.
The system is capable of forming any layer needed to build-up an OLED device with a film uniformity of < 3% and an alignment accuracy of < 20µm at a tact time < 2 min (1000 Å film).
The system can be completed as a turnkey manufacturing line with TCO coating, glass
processing, quality and defect inspection tools with all necessary applications, as well
as a complete glass encapsulation line.